SM-1441 Wafer Cleaning Machine
Product Model:
SM-1441
Product Description
Product Details
Machine features:
1. Adjustable product placement fixture, capable of cleaning 5-inch, 8-inch, and 12-inch products (customized according to the size of the customer’s product fixture).
2. The operating procedures can be customized and adjusted according to actual job requirements, making them convenient, quick, and more user-friendly.
3. Rotary spray arm design: The spray arm rotates during both washing and spinning, preventing recontamination of the product after spinning.
4. High-speed centrifugal design, with a counterclockwise speed adjustment range of 10–2000 (r/min).
5. The upper and lower spray bars can be manually switched to operate independently or simultaneously (for both gas and pure water).
6. The device comes with a two-stage air filtration system that ensures cleaner air after connection, with a filtration level of 0.01 μm.
7. The device comes with a built-in purified water source filtration system, ensuring that the DI water delivered to the connected equipment is even cleaner, with a filtration level of 1 μm.
8. The internal environment of the machine can reach Class 10 under static conditions, more effectively reducing secondary contamination after product cleaning.
9. Key components of the water and gas lines are made of SUS316 material, further ensuring the cleanliness of the water and gas sources.
10. The entire machine features a SUS304 mirror-finish stainless steel body that is resistant to acid and alkali corrosion, environmentally friendly, and easier to clean.
11. Patent-protected cleaning chamber design with secondary stainless steel FFU air filtration ensures open-loop discharge of DI water and air, thereby preventing secondary pollution.
12. The 4–12-inch wafer fixture tray is machined using a precision grinding machine to ensure minimal amplitude during high-speed rotation and stable operation.
13. Patent-designed spray bar nozzle with uniform atomization and consistent spray pressure.
Machine parameters:
|
Device dimensions (mm) |
550(L) × 750(W) × 1650(H) |
Pure water inlet diameter |
Φ12mm hose |
|
Fixture Specifications |
Customized according to customer products |
Drainage outlet diameter |
Outer diameter 30mm, inner diameter 25mm, storm pipe |
|
Outlet diameter |
4″ (110mm) × 2 units (requires enhanced ventilation, with airflow velocity exceeding 3 m/s) |
Air source inlet diameter |
Φ12mm PU air hose |
|
Power supply |
Three-phase five-wire power supply |
Power consumption |
During cleaning: approximately 1.5 kW/h (machine in normal production) |
|
Total power |
2KW |
Gas supply |
0.40-0.7Mpa |
|
Centrifugal speed |
10–2000 rpm |
DI water supply demand |
Pressure > 0.25 MPa; Flow rate > 10 L/min |
|
Motor power |
1500W |
Drive mode |
Servo motors (Mitsubishi/Panasonic/Delta) |
|
Pure water consumption |
0-4 L/min |
Environmental filtering method |
0.3μm filtration efficiency: 99.9995% |
|
Gas consumption |
50-100L/Min |
Machine net weight |
Approximately 220 kg |
|
Air filtration method |
5 μm × 1 (primary filtration); 0.01 μm × 1 (precision filtration); 0.01 μm × 1 (precision filtration) |
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