SM-COII-900LH CO₂ Foaming Machine-Shenzhen SAM Electronic Equipment Co., Ltd.

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Products

SM-COII-900LH CO₂ Foaming Machine

Product Model:

SM-COII-900LH CO₂

Product Description

This equipment dissolves CO₂ gas into DIW. The dissolved carbon dioxide is converted into ions within the DIW, effectively eliminating static charge during semiconductor cleaning processes and preventing electrostatic damage as well as dust adhesion. It is suitable for use in process equipment requiring high cleanliness or static-free cleaning, such as dicing cleaning, mask plate cleaning, scrubber cleaning, high-pressure cleaning, and Foup box cleaning.

Product Details

Device features:

1. Simple structure, convenient operation, and low failure rate.

2. The piping and valve components are made of PFA material to ensure ultra-pure water purity.

3. The carbon dioxide filtration membrane is made of PTFE material, ensuring cleanliness and a long service life.

4. Resistivity stabilized within ±15%.

5. Maintain stable resistivity under extremely low flow rates.

6. Equipped with a leak alarm function

7. Supports data logging and historical queries.

Device parameters:

Device Name	CO₂ foaming machine	Mixer intake pressure	0.05–0.1 MPa
Device model	SM-COII-9OOLH	Inlet pressure	0.35–0.45 MPa
Processing capacity	50-14000mL/min	Device power	Single-phase 220 V AC
Resistance value control range	0.1–2.0 MQ*cm	Device power	0.2 kW
Use gas	CO₂, purity 99.99% or higher (oil-free, particle-free)	Device dimensions	240W × 504D × 440H
Use the water source	>15M ultrapure water	Device weight	28 Kg
Equipment intake pressure	0.2–0.4 MPa	/	/