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SM-800 Semi-Automatic Tray Cleaning Machine
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  • SM-800 Semi-Automatic Tray Cleaning Machine

SM-800 Semi-Automatic Tray Cleaning Machine

Product Model:

SM-800


Product Description

The SM-800 semi-automatic cassette cleaning machine can load up to 8 sets of 12-inch FOUP cassettes and their lids at one time. It has undergone safety testing covering aspects such as safety and environmental protection, personnel safety, hazard warning signs, safety interlocks, emergency stop functions, electrical safety, fire safety, ergonomics, hazardous energy isolation, mechanical design safety, earthquake protection, automated machinery, environmental factors, exhaust ventilation, chemical safety, free radiation safety, non-ionizing radiation safety, laser safety, and noise levels.
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Product Details


Machine features:

1. The SM-800 semi-automatic tray washer achieves product cleaning through a process that involves spraying, centrifugal spin-drying, and drying.

2. It can hold up to 8 sets of 12-inch FOUP boxes and lids at a time.

3. Simply use DI water—no cleaning agents or other chemical liquids are required.

4. The cleaning process can be customized to achieve optimal cleaning results.

5. The equipment is compact and occupies a small footprint.

6. The equipment features sliding doors on both the front and back sides, enabling loading and unloading operations to be performed in cleanrooms of different cleanliness levels.

7. The DI water has a heating function to enhance its cleaning performance.

8. Nitrogen and blowers with heating function can shorten the drying time.

9. DI water is not recycled; after spraying, it is directly discharged to ensure water quality.

 

Machine parameters:

Cleaning specifications

4”-12”

CDA pressure

0.6Mpa

Cleaning quantity

8–72 pcs (depending on the product)

CDA+N₂ interface

1/2 inch

Cleaning type

FOUP, FOSB, and various cassette types

Pure water interface

1 inch

Control method

PLC + Touch Screen

Drainage interface

1-1/4 inch, 2 pieces

Operation interface

Chinese/English

Exhaust port

PP DE200

Drying method

CDA/N₂ purging + hot-air drying

Total power

50KW

Nozzle specifications

Configure specifically according to different product structures.

Power supply

AC 380V, three-phase five-wire, 125A, 50Hz

Device dimensions

2280*1740*2650 (L*W*H) mm