SM-800 Semi-Automatic Tray Cleaning Machine
Product Model:
SM-800
Product Description
Product Details
Machine features:
1. The SM-800 semi-automatic tray washer achieves product cleaning through a process that involves spraying, centrifugal spin-drying, and drying.
2. It can hold up to 8 sets of 12-inch FOUP boxes and lids at a time.
3. Simply use DI water—no cleaning agents or other chemical liquids are required.
4. The cleaning process can be customized to achieve optimal cleaning results.
5. The equipment is compact and occupies a small footprint.
6. The equipment features sliding doors on both the front and back sides, enabling loading and unloading operations to be performed in cleanrooms of different cleanliness levels.
7. The DI water has a heating function to enhance its cleaning performance.
8. Nitrogen and blowers with heating function can shorten the drying time.
9. DI water is not recycled; after spraying, it is directly discharged to ensure water quality.
Machine parameters:
|
Cleaning specifications |
4”-12” |
CDA pressure |
0.6Mpa |
|
Cleaning quantity |
8–72 pcs (depending on the product) |
CDA+N₂ interface |
1/2 inch |
|
Cleaning type |
FOUP, FOSB, and various cassette types |
Pure water interface |
1 inch |
|
Control method |
PLC + Touch Screen |
Drainage interface |
1-1/4 inch, 2 pieces |
|
Operation interface |
Chinese/English |
Exhaust port |
PP DE200 |
|
Drying method |
CDA/N₂ purging + hot-air drying |
Total power |
50KW |
|
Nozzle specifications |
Configure specifically according to different product structures. |
Power supply |
AC 380V, three-phase five-wire, 125A, 50Hz |
|
Device dimensions |
2280*1740*2650 (L*W*H) mm |
||