SM-MCP-200 Manual Cleaning Station-Shenzhen SAM Electronic Equipment Co., Ltd.

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SM-MCP-200 Manual Cleaning Station

Product Model:

SM-MCP-200

Product Description

Dedicated equipment for manual wet cleaning and processing of wafers. Its core function is to enable operators to use organic solvents (such as acetone, ethanol, NMP, etc.) or inorganic solvents (SPM, SC₁, SC₂) to remove contaminants from the wafer surface—such as photoresist, particles, metallic impurities, and residual organic substances—through specific manual procedures including soaking, rinsing, and wiping.

Product Details

Device features:
1. Equipped with 3 quartz tanks and 2 PVDF QDR tanks

2. Washable standard 3-inch/6-inch/8-inch dedicated wafer card holder *1

3. Optional fire protection unit: IR (flash point) / TH (thermal sensing) detection, 3C certification

4. The front operating door of the equipment features an integrated push-and-slide design (with a blast-resistant transparent glass window).

5. Two high-capacity exhaust systems, manually adjustable valves, low-air-pressure alarm, and differential pressure gauge.

6. Heating safety interlock, leakage protection

Device parameters

Specification Type	Organic cleaning bench / Inorganic cleaning bench	QDR slot	Quantity: 2; actual design based on volume; PVDF material.
Machine dimensions	1800mm × 1200mm × 1950mm	Medication Name	DIW
Process tank	Quantity: 3, Volume: 16L, Made of quartz	Process temperature	RT
Medication Name	Organic liquid	Liquid Level Monitoring	Multi-stage N₂ Level Sensor
Process temperature	RT～80℃ ±3℃	Water resistance value	External water resistance meter
Heating method	Water bath heating	Top spray	Left-right spray
Temperature detection	PT100*2	N₂ bubbling	The bubble distribution at the bottom of the tank is uniform, and the bubble size can be adjusted via a manual pressure regulator.
Liquid Level Monitoring	Multi-stage N₂ Level Sensor	Trough structure	Over Flow + Quick Down
Slot cover	Manual PVDF槽盖	Quick sort time	The entire tank can be drained within 5S.
Valve and piping material	PFA	Water supply	Factory water supply has completed the upper and lower replenishment.
Ultrasound	40 kHz, 600 W (power adjustable)	Emission	Gravity-discharge plant utilities—separate pipelines for liquid wastewater and recycled water.
Acid supply mode	Manual acid supply	/
Emission	Gravity discharge for plant utilities—waste liquids and wastewater flow through separate pipelines.	/