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SM-TUR-100 Furnace Tube Cleaning Machine
Product Model:
SM-TUR-100
Product Description
Vertical and horizontal tube boat cleaners are widely used in fields such as integrated circuits, packaging, and photovoltaics. Employing an immersion-based processing method, these cleaners are primarily used for cleaning quartz tubes/boats and silicon carbide tubes used in diffusion and epitaxy equipment with wafer sizes of 12 inches or smaller.
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Product Details
Device features:
1. Available options include fully automatic cleaning, immersion cleaning, and spray cleaning methods.
2. Multi-purpose machine, compatible with quartz tube/boat cleaning.
3. Automatic liquid dispensing system for quick acid replacement.
4. Tiered Safety Interlock Configuration
Device parameters
| Machine dimensions | Organic cleaning bench / Inorganic cleaning bench |
| Process tank | Quantity: 3, Capacity: 16L, Made of quartz |
| Medication Name | Organic liquid |
| Process temperature | RT～80℃ ±3℃ |
| Heating method | Water bath heating |
| Temperature detection | PT100*2 |
| Liquid Level Monitoring | Multi-stage N₂ Level Sensor |
| Slot cover | Manual PVDF槽盖 |
| Valve and piping material | PFA |
| Ultrasound | 40 kHz, 600 W (power adjustable) |
| Acid supply mode | Manual acid supply |
| Emission | Gravity discharge for plant utilities—waste liquids and wastewater in separate pipelines. |
Shenzhen SAM Electronic Equipment Co., Ltd.
Email:
sales@china-sam.com
Address:
1st Floor, Building 13, Hongfa Industrial Park Shixin Community, Shiyan Subdistrict Bao'an District, Shenzhen